Patenton — panteon of patents

(19)

SU

(11)

1 597 018

(13)

A1

(51)

IPC

(21) (22)

Application

4646000/25, 1989-02-03

(22)

Actual filing date

1989-02-03

(45)

Published

1996-05-27

(72)

Inventor

Olejnik S.P.Matyna L.I.Il'Ichev Eh.A.Lipshits T.L.Inkin V.N.Emel'Janov A.V.Poltoratskij Eh.A.Varlamov I.V.Pekarev A.I.

TRANSISTOR MANUFACTURING PROCESS Russian patent published in 1996 - IPC

Abstract SU 1597018 A1

FIELD: electronic engineering; manufacture of semiconductor devices, such as MIS transistors, on galium arsenide substrate. SUBSTANCE: insulating material is deposited onto galium arsenide substrate that has drain and source regions by using pyrolysis method. Zink diethyl dithiocarbamate is used as gas mixture. EFFECT: improved transconductance of transistors. 1 tbl

Similar patents SU1597018A1

Title Year Author Number
METHOD OF OBTAINING DIELECTRIC COATINGS 1980
  • Il'Ichev Eh.A.
  • Slepnev Ju.V.
  • Poltoratskij Eh.A.
  • Rodionov A.V.
  • Emel'Janov A.V.
  • Inkin V.N.
 SU940601A1
METHOD FOR MANUFACTURING FIELD-EFFECT TRANSISTORS WITH SELF-ALIGNING GATE 1989
  • Akhin'Ko I.A.
  • Il'Ichev Eh.A.
  • Inkin V.N.
 SU1628766A1
MEMORY CELL 1984
  • Il'Ichev Eh.A.
  • Masloboev Ju.P.
  • Poltoratskij Eh.A.
  • Rodionov A.V.
  • Slepnev Ju.V.
 SU1153768A1
FIELD-EFFECT SCHOTTKY TRANSISTOR 1991
  • Gergel' V.A.
  • Il'Ichev Eh.A.
  • Onishchenko V.A.
  • Poltoratskij Eh.A.
  • Rodionov A.V.
  • Tarnavskij S.P.
  • Fedorenko A.V.
 RU2025831C1
METHOD OF MAKING MICROWAVE FIELD-EFFECT TRANSISTOR 2012
  • Blinov Gennadij Andreevich
  • Butenko Elena Vasil'Evna
 RU2523060C2
OPTICAL-ELECTRONIC MEMORY GATE 1985
  • Il'Ichev Eh.A.
  • Poltoratskij Eh.A.
 SU1284439A1
MEMORY CELL 1984
SU1153769A1
METHOD FOR MANUFACTURING SELF-ALIGNED GATE FIELD-EFFECT TRANSISTORS 1988
  • Artamonov M.M.
  • Il'Ichev Eh.A.
  • Akhin'Ko I.A.
  • Inkin V.N.
  • Grigor'Ev A.T.
  • Gol'Dberg E.Ja.
  • Lipshits T.L.
  • Sheljukhin E.Ju.
 SU1565292A1
INVERTER 1988
  • Rodionov A.V.
  • Sveshnikov Ju.N.
  • Emel'Janov A.V.
  • Kravchenko L.N.
  • Zybin S.N.
  • Il'Ichev Eh.A.
  • Inkin V.N.
  • Poltoratskij Eh.A.
  • Shmelev S.S.
 SU1649973A1
METHOD OF FIELD EFFECT TRANSISTOR PRODUCTION WITH SCHOTTKY BARRIER 2007
  • Romanov Vadim Leonidovich
  • Dragut' Maksim Viktorovich
 RU2349987C1

SU 1 597 018 A1

Authors

Olejnik S.P.

Matyna L.I.

Il'Ichev Eh.A.

Lipshits T.L.

Inkin V.N.

Emel'Janov A.V.

Poltoratskij Eh.A.

Varlamov I.V.

Pekarev A.I.

Dates

1996-05-27—Published

1989-02-03—Filed

read Similar patents