METHOD FOR DEPOSITING METAL LAYER ON SEMICONDUCTOR DEVICES Russian patent published in 1995 - IPC

Abstract SU 1679911 A1

FIELD: microelectronics. SUBSTANCE: upon removal of photoresist, Tiw film is subjected to incomplete etching by plasma through two thirds of layer thickness. Then layer is fully etched in hydrogen peroxide and acetic acid solution in 1:1 proportion at temperature of 40-45 C. EFFECT: improved reliability of semiconductor devices. 2 cl, 2 tbl

Similar patents SU1679911A1

Title	Year	Author	Number
PROCESS OF SELECTIVE ETCHING OF SILICON-CONTAINING LAYER IN MULTILAYER STRUCTURES	0	Stasyuk Igor Olegovich Kunitsin Anatolij Viktorovich Fominykh Nikolaj Arkadevich Ivankovskij Maksim Maksimovich Meertal Igor Olegovich Ostapchuk Sergej Aleksandrovich	SU1819356A3
PHOTOELECTRIC TRANSDUCER MANUFACTURING METHOD	2002	Samsonenko B.N. Khabarov S.Eh.	RU2219621C1
METHOD OF PRODUCING VERTICALLY EMITTING LASER WITH INTRACAVITY CONTACTS AND DIELECTRIC MIRROR	2016	Blokhin Sergey Anatol'Evich Maleev Nikolay Anatol'Evich Kuz'Menkov Aleksandr Georgievich Vasil'Ev Aleksey Petrovich Zadiranov Yury Mikhailovich Kulagina Marina Mikhailovna Ustinov Viktor Mikhailovich	RU2703938C1
METHOD FOR MAKING A PHOTO-TRANSFORMER	2005	Samsonenko Boris Nikolaevich Pelipenko Boris Fedorovich Razuvajlo Sergej Nikolaevich	RU2292610C1
METHOD OF MAKING MULTILAYER PHOTOCELL CHIPS	2012	Andreev Vyacheslav Mikhaylovich Il'Inskaya Natal'Ya Dmitrievna Lantratov Vladimir Mikhaylovich Malevskaya Aleksandra Vyacheslavovna Zadiranov Yury Mikhaylovich Usikova Anna Aleksandrovna	RU2492555C1
PHOTOELECTRIC CONVERTER MANUFACTURING PROCESS	2003	Samsonenko B.N. Pelipenko B.F.	RU2244986C1
METHOD OF MAKING MULTILEVEL METALLISATION OF INTEGRATED MICROCIRCUITS WITH POROUS DIELECTRIC LAYER IN GAPS BETWEEN CONDUCTORS	2011	Valeev Adil' Salikhovich Shishko Vladimir Aleksandrovich Ranchin Sergej Olegovich Vorotilov Konstantin Anatol'Evich Vasil'Ev Vladimir Aleksandrovich	RU2459313C1
PROCESS OF MANUFACTURE OF INTEGRATED MICROCIRCUITS WITH SCHOTTKY DIODES HAVING DIFFERENT HEIGHT OF POTENTIAL BARRIER	1988	Bodnar' D.M. Kastrjulev A.N. Korol'Kov S.N.	SU1589932A1
METHOD FOR MANUFACTURING OF IMPROVED MULTILEVEL COPPER METALLISATION USING DIELECTRICS WITH ULTRA LOW DIELECTRIC CONSTANT (ULTRA LOW-K)	2011	Valeev Adil' Salikhovich Krasnikov Gennadij Jakovlevich Gvozdev Vladimir Aleksandrovich	RU2486632C2
METHOD TO MANUFACTURE MULTI-LEVEL INTERCONNECTIONS OF INTEGRAL MICROCIRCUIT CHIPS WITH AIR GAPS	2010	Valeev Adil' Salikhovich Shishko Vladimir Aleksandrovich Ranchin Sergej Olegovich	RU2436188C1

SU 1 679 911 A1

Authors

Kastrjulev A.N.

Rozes I.M.

Tkacheva R.I.

Sidorova M.N.

Dates

1995-11-27—Published

1989-08-28—Filed