METHOD OF JOINING QUARTZ TARGET TO CATHODE Russian patent published in 1994 - IPC

Abstract SU 1706236 A1

FIELD: application of coatings in vacuum. SUBSTANCE: inactive surface of target and the cathode are coated in vacuum with fractionating alloy containing 4.0-5.0% Mg, 5.0-6.0 Ge, 20.0-25.0 Sn, 64.0-71.0 Cu at the rate of then, also in vacuum, they are pressed with a force of about ≥ 0,25 kg/cm2 and held at 260-280 C for 8-10 min. The service life of targets connected to cooled cathode in ion-pulverizing systems is increased twice. EFFECT: higher efficiency. 1 tbl

Similar patents SU1706236A1

Title Year Author Number
EXOTHERMIC GLASS AND METHODS OF ITS PRODUCTION 1992
  • Chull-Voo Khehn[Kr]
RU2075537C1
MULTIPLE-LAYER SHEET AND FOOD PRODUCT, MEDICINE DRUG OT TOOL PACKAGE MANUFACTURED FROM MULTIPLE-LAYER SHEET 2002
  • Nisijama Katsukhiro
  • Abeh Masakhiko
  • Kugeh Raidzo
  • Niva Susumu
RU2301743C2
PROCEDURE FOR FABRICATION OF COMPOSITE CATHODE 2009
  • Pribytkov Gennadij Andreevich
  • Korosteleva Elena Nikolaevna
  • Gurskikh Aleksej Valer'Evich
  • Korzhova Viktorija Viktorovna
  • Vagner Marina Ivanovna
RU2421844C1
GAS-DISCHARGE SPUTTERING APPARATUS BASED ON PLANAR MAGNETRON WITH ION SOURCE 2020
  • Semenov Aleksandr Petrovich
  • Semenova Irina Aleksandrovna
  • Tsyrenov Dmitrii Badma-Dorzhievich
  • Nikolaev Erdem Olegovich
RU2752334C1
PROTECTIVE LAYER FOR METAL ELECTRODE AND LITHIUM BATTERY CONTAINING THEREOF 2021
  • Takata, Ryo
  • Schmidt, Franz
  • Esken, Daniel
  • Lee, Ting-Tai
  • Fang, Chia-Chen
  • Wu, Nae-Lih
RU2823264C1
METHOD OF MANUFACTURING LIQUID-METAL REED RELAY CONTACT MEMBER 0
  • Alaev Mikhail Aleksandrovich
  • Karpov Valerij Nikolaevich
  • Ostrovskaya Larisa Mikhajlovna
  • Rodin Viktor Nikiforovich
  • Kiryanova Lyudmila Tikhonovna
SU1749929A1
CHARGE FOR COMPOSITE CATHODE, AND METHOD FOR ITS MANUFACTURE 2011
  • Pribytkov Gennadij Andreevich
  • Korosteleva Elena Nikolaevna
  • Firsina Irina Aleksandrovna
  • Korzhova Viktorija Viktorovna
  • Savitskij Arnol'D Petrovich
RU2454474C1
METHOD OF SYNTHESIS OF TiN-Cu COMPOSITE COATINGS AND DEVICE FOR ITS IMPLEMENTATION 2017
  • Semenov Aleksandr Petrovich
  • Tsyrenov Dmitrij Badma-Dorzhievich
  • Semenova Irina Aleksandrovna
RU2649355C1
METHOD FOR MANUFACTURING OF CATHODE FOIL AND CATHODE FOIL FOR ELECTROLYTIC CAPACITOR 1996
  • Rjazantsev Sergej Nikolaevich[Ua]
  • Jurkevich Igor' Nikolaevich[Ua]
RU2098878C1
WIRE-ADDITIVE, PROCEDURE FOR ITS FABRICATION AND IMPLEMENTATION 2009
  • Sharuda Aleksandr Nikolaevich
  • Kol'Tsov Vladislav Viktorovich
  • Kazakov Sergej Vasil'Evich
  • Pavlov Sergej Vladimirovich
RU2424326C1

SU 1 706 236 A1

Authors

Bessonov V.A.

Lennikov L.A.

Kostjuk E.A.

Dates

1994-12-15Published

1990-01-11Filed