FIELD: application of coatings in vacuum. SUBSTANCE: inactive surface of target and the cathode are coated in vacuum with fractionating alloy containing 4.0-5.0% Mg, 5.0-6.0 Ge, 20.0-25.0 Sn, 64.0-71.0 Cu at the rate of then, also in vacuum, they are pressed with a force of about ≥ 0,25 kg/cm2 and held at 260-280 C for 8-10 min. The service life of targets connected to cooled cathode in ion-pulverizing systems is increased twice. EFFECT: higher efficiency. 1 tbl
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Authors
Dates
1994-12-15—Published
1990-01-11—Filed