FIELD: instrumentation engineering. SUBSTANCE: ion source has cathode assembly with axial holes, annular anode, electron collector, ion extraction system, power supply, all arranged coaxially and in tandem. Ion source is provided, in addition, with annular anode arranged coaxially in respect to cathode assembly on side opposite to that facing main anode. Anode is connected to additional power supply. Cathode assembly has two disks arranged coaxially and spaced apart, with hole along axis. Grid assembly whose grid planes are inclined through certain angle to source axis is placed between disks. EFFECT: enlarged functional capabilities. 1 dwg
Title | Year | Author | Number |
---|---|---|---|
ION SOURCE | 0 |
|
SU1187623A1 |
PULSE NEUTRON GENERATOR | 2021 |
|
RU2773038C1 |
ELECTRON GUN | 2005 |
|
RU2289867C1 |
METHODS USING REMOTE ARC DISCHARGE PLASMA | 2013 |
|
RU2640505C2 |
CONTROLLED EMITTING UNIT OF ELECTRONIC DEVICES WITH AUTOELECTRONIC EMISSION AND X-RAY TUBE WITH SAID UNIT | 2014 |
|
RU2581835C1 |
PLASMA-IMMERSION ION TREATMENT AND DEPOSITION OF COATINGS FROM VAPOUR PHASE WITH HELP OF LOW-PRESSURE ARC DISCHARGE | 2014 |
|
RU2695685C2 |
ION SOURCE | 1994 |
|
RU2067784C1 |
ELECTRON GUN | 1983 |
|
RU2040822C1 |
WIDE-ANGLE GASEOUS ION SOURCE | 2007 |
|
RU2338294C1 |
METHOD OF PRODUCING DIAMOND-LIKE CARBON AND DEVICE TO THIS END | 2013 |
|
RU2567770C2 |
Authors
Dates
1995-08-20—Published
1989-10-04—Filed