METHOD FOR POLISHING CERAMIC PLATES Russian patent published in 1994 - IPC

Abstract SU 1743114 A3

FIELD: polishing. SUBSTANCE: polishing composition is applied to the working surface of a tool. The composition has a diamond powder, glycerin and a synthetic washing substance. A diluent - silicasol with 3.4-11.0% of silicon dioxide is fed to the working zone. The amount of applied polishing composition to fed diluent ratio is 1:(3-6) respectively. EFFECT: improved quality. 1 tbl

Similar patents SU1743114A3

Title Year Author Number
METHOD FOR POLISHING OF WAFERS OF CERAMIC MATERIALS 1998
  • Rogov V.V.
  • Savushkin Ju.A.
RU2166423C2
METHOD FOR POLISHING SEMICONDUCTOR MATERIALS 2004
  • Enisherlova-Vel'Jasheva Kira L'Vovna
  • Savushkin Jurij Aleksandrovich
  • Burobin Valerij Anatol'Evich
  • Rusak Tat'Jana Fedorovna
  • Trigubovich Tat'Jana Nikolaevna
RU2295798C2
PROCESS OF POLISHING SEMICONDUCTOR PLATES 1991
  • Rogov V.V.
  • Zakaznova V.D.
  • Tjun'Kova Z.V.
  • Erusalimchik I.G.
RU2007784C1
METHOD FOR FINISHING PARTS MADE OF MATERIALS INTERACTING WITH WATER 1990
  • Savushkin Ju.A.
  • Rogov V.V.
SU1792555A3
METHOD FOR COMBINED CHEMICAL AND MECHANICAL POLISHING OF PLATES FROM GALLIUM ARSENIDE 1990
  • Rogov V.V.
  • Zakaznova V.D.
  • Tjun'Kova Z.V.
  • Bashevskaja O.S.
  • Kolmakova T.P.
RU1715133C
METHOD OF POLISHING 1988
  • Tatarenkov A.I.
  • Rogov V.V.
  • Zabolotskaja N.I.
  • Baranova T.A.
RU1517244C
METHOD FOR CHEMICAL-MECHANICAL POLISHING OF GALLIUM ARSENIDE PLATES 2014
  • Kiseleva Larisa Vasil'Evna
  • Boltar' Konstantin Olegovich
  • Vlasov Pavel Valentinovich
  • Eremchuk Anatolij Ivanovich
  • Efimova Zinaida Nikolaevna
  • Lopukhin Aleksej Alekseevich
  • Savostin Aleksandr Viktorovich
RU2545295C1
METHOD OF FINISHING CHEMICAL-MECHANICAL POLISHING OF InAs PLATES 2014
  • Kovalishina Ekaterina Alekseevna
RU2582904C1
METHOD FOR TREATMENT OF SEMICONDUCTOR WAFERS 2003
  • Rogov V.V.
  • Konstantinov P.B.
RU2249881C1
METHOD FOR ABRASIVE MACHINING OF SPHERICAL OPTICAL SURFACES 2007
  • Ostrun Boris Naumovich
RU2347659C2

SU 1 743 114 A3

Authors

Rogov V.V.

Erusalimchik I.G.

Savushkin Ju.A.

Shaljapin A.B.

Dates

1994-07-15Published

1990-06-25Filed