METHOD OF MANUFACTURING TARGETS FOR PREPARATION OF THIN FILMS Russian patent published in 1996 - IPC

Abstract SU 1786749 A1

FIELD: high-temperature superconductors. SUBSTANCE: invention relates to targets for preparing superconductor films by magnetron sputtering technique. Target is prepared by mixing iridium oxide, barium carbonate, cupric carbonate, and cupric hydroxide in roll mill followed by heating at 920-975 C for 20 h. Obtained superconductor powder is pressed in into a copper substrate under 5-40 MPa pressure and then calcined in air at 950-1050 C for 4-7 h. EFFECT: increased size of targets and their service life. 3 dwg

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SU 1 786 749 A1

Authors

Afanas'Ev V.P.

Vinokurov M.P.

Egorova T.N.

Olesk A.O.

Prjazhkin V.B.

Tallerchik B.A.

Dates

1996-09-20Published

1989-10-06Filed