METHOD OF MANUFACTURING TARGET Russian patent published in 1997 - IPC

FIELD: coatings. SUBSTANCE: invention relates to technology of manufacturing targets for cathode spraying of materials and may find use in mechanical engineering, instrumentation engineering, radioelectronics, etc. High-speed heating of spraying material powder in low-temperature plasma stream to a temperature by 50-200 K exceeding its melting temperature is used, which results in reducing probability of oxidation and burning out of elements, whereas further acceleration of material in plasma stream to velocity 200-350 m/s promotes increase in density of coating and filling microasperities of surface with molten particles, which, in turn, provides strong adhesion of coating with target base and high mechanical strength upon thermal strikes and heat cycling. Maintaining temperature of target base upon deposition of molten particles in the range 280-350 K reduces internal strains in applied layer and leads to greater thickness of sprayed material layer in points of most intensive wear thereby increasing usage factor of target material. EFFECT: improved performance characteristics of coating.