METHOD FOR MANUFACTURING OF TARGET FOR MAGNETRON APPLICATION OF SUPERCONDUCTING FILMS OF FOLLOWING COMPOSITION - Bi-Pb-Sr-Ca-Cu-O Russian patent published in 2010 - IPC H01L39/24 

Abstract RU 2385517 C1

FIELD: electric engineering.

SUBSTANCE: invention may be used to manufacture targets designed for production of nanosize films of high temperature superconductor (HTSC) by method of magnetron sputtering. In method of target manufacturing for magnetron application of superconducting films with composition of Bi-Pb-Sr-Ca-Cu-O, including charging superconducting finely dispersed powder into cartridge, putting cartridge into die mould and pressing by means of steel puncheon, cartirdge made of copper is used, bottom and side walls of which are tinned with a layer of lead, and at the moment of pressing cartridge is heated up to the temperature of lead melt.

EFFECT: development of method for manufacturing of multicomponent target for magnetron sputtering of superconducting films with composition of Bi-Pb-Sr-Ca-Cu-O, which provides for efficient heat removal from ceramics in process of sputtering and is protected against cracking.

3 cl, 6 dwg, 1 ex

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RU 2 385 517 C1

Authors

Grigorashvili Jurij Evgen'Evich

Verjuzhskij Ivan Vasil'Evich

Mingazin Vladislav Tomasovich

Bukhlin Aleksandr Viktorovich

Dates

2010-03-27Published

2008-12-22Filed