DEVICE FOR X-RAY LUMINESCENT ANALYSIS OF THIN FILMS Russian patent published in 1996 - IPC

FIELD: X-ray analysis. SUBSTANCE: device has monoblock 11 with radiation source and power supply mounted on linear displacement unit 13, primary beam shaping unit having diaphragm 16 and collimator formed by two reflectors 7, 10 affording full external reflection, their reflecting planes being parallel. Energy dispersing detector 2 is placed in head of cryostat 1 mounted on stops in a spaced relation in vacuum mandrel 4 with unions 5,6. Mandrel mounts sealed first reflector with through aperture coaxial to aperture 3 of cryostat. Specimen holder 12 is placed on reflecting surface of second collimator reflector opposite aperture. Reflectors are joined together through vacuum- tight gaskets 9 installed on reflecting surface of first reflector for passing X-rays. EFFECT: simplified design due to using radiation source with end emission of rays and placed in monoblock with power supply; space-saving arrangement. 1 dwg