FIELD: semiconductor devices. SUBSTANCE: package has ceramic base carrying serially arranged layers of high-melting material and molybdenum; used as high-melting material is solid solution of molybdenum in titanium in the following proportion of components, mass percent: Mo - 12.5-16.6; Ti - 83.4-87.5. EFFECT: reduced thermal resistance and improved reliability.
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Authors
Dates
1997-01-10—Published
1978-06-01—Filed