PRE-EPITAXIAL TREATMENT OF OXIDES BASES Russian patent published in 1994 - IPC

Abstract RU 2010044 C1

FIELD: monocrystal plates processing. SUBSTANCE: pre-etching cleansing of the bases is finished in boiling Karo mixture and etching itself is carried in concentrated sulphur acid under temperature of 250-270 C within 0.5-1.5 minutes. Then the cleansing is repeated. EFFECT: method allows to decrease number of defects on the base up to 1 -2 bright points in a microscope zone of view with magnification 370 and excludes such defects as edge slanting and background marks. 1 tbl

Similar patents RU2010044C1

Title Year Author Number
ETCHING AGENT FOR CHEMICAL SMOOTHING OF SUBSTRATES OF CADMIUM TELLURIDE 1993
  • Dronov V.I.
RU2033658C1
METHOD FOR PRE-EPITAXIAL TREATMENT OF SURFACE OF GERMANIUM SUBSTRATE 2013
  • Belousov Viktor Sergeevich
  • Illarionov Vladimir Viktorovich
  • Lapshina Anastasija Anatol'Evna
  • Spitsyna Nadezhda Nikanorovna
  • Chebotarev Jurij Alekseevich
  • Chebotareva Anna Alekseevna
RU2537743C1
PROCESS OF MANUFACTURE OF SEMICONDUCTOR COMPONENTS OF SHF HIGH-POWER TRANSISTOR MICROASSEMBLIES 1991
  • Gaganov V.V.
  • Zhil'Tsov V.I.
  • Pozhidaev A.V.
  • Popova T.S.
RU2017271C1
PROCESS OF LOCAL ETCHING OF GALLIUM PHOSPHIDE 1991
  • Libo N.A.
  • Pukhljakov Ju.A.
  • Prigoda E.I.
SU1814446A1
METHOD FOR PRE-EPITAXIAL TREATMENT OF SURFACE OF GERMANIUM SUBSTRATE 2011
  • Andreev Vjacheslav Mikhajlovich
  • Kudrjashov Dmitrij Aleksandrovich
  • Levin Roman Viktorovich
RU2483387C1
MANUFACTURING PROCESS FOR DOUBLE-LEVEL METALLIZED LARGE-SCALE INTEGRATED CIRCUITS 1991
  • Krasnozhon A.I.
  • Frolov V.V.
  • Khvorov L.I.
RU2022407C1
HIGH-TEMPERATURE SUPERCONDUCTIVE EPITAXIAL STRUCTURE 1992
  • Krivts B.L.
  • Limitovskij E.P.
RU2038655C1
PROCESS OF MANUFACTURE OF STRUCTURES FOR MIS LSICS 1990
  • Dmitriev N.V.
  • Sukhorukov N.I.
RU1743315C
PROCESS OF MANUFACTURE OF POWERFUL MULTIEMITTER S H F TRANSISTORS WITH BALLAST RESISTORS 1988
  • Asessorov V.V.
  • Veligura G.A.
RU1630564C
METHOD OF PREPARATION OF SEMICONDUCTOR SUBSTRATES 1994
  • Skupov V.D.
RU2072585C1

RU 2 010 044 C1

Authors

Jaremchuk L.E.

Anosova T.A.

Senderzon E.R.

Pugachev V.A.

Dates

1994-03-30Published

1991-06-03Filed