FIELD: monocrystal plates processing. SUBSTANCE: pre-etching cleansing of the bases is finished in boiling Karo mixture and etching itself is carried in concentrated sulphur acid under temperature of 250-270 C within 0.5-1.5 minutes. Then the cleansing is repeated. EFFECT: method allows to decrease number of defects on the base up to 1 -2 bright points in a microscope zone of view with magnification 370 and excludes such defects as edge slanting and background marks. 1 tbl
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