ETCHING AGENT FOR CHEMICAL SMOOTHING OF SUBSTRATES OF CADMIUM TELLURIDE Russian patent published in 1995 - IPC

Abstract RU 2033658 C1

FIELD: semiconductor devices. SUBSTANCE: etching agent includes following components, per cent by mass: chrome oxide 2.0-15.0; sulfamic acid 10.0-20.0; water being the balance. EFFECT: expended range of application of etching agent.

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RU 2 033 658 C1

Authors

Dronov V.I.

Dates

1995-04-20—Published

1993-06-21—Filed