METHOD FOR PRODUCING BORON NITRIDE LAYERS ON SEMICONDUCTOR SUBSTRATES Russian patent published in 1994 - IPC

Abstract RU 2012092 C1

FIELD: manufacture of semiconductor structures. SUBSTANCE: boron nitride layers are produced as result of reaction of borazole and helium under HF discharge conditions. EFFECT: facilitated procedure. 1 tbl

Similar patents RU2012092C1

Title	Year	Author	Number
PROCESS OF MANUFACTURE OF LAYERS OF SILICON OXIDE	1992	Smirnova T.P. Khramova L.V. Eremina E.G.	RU2013819C1
METHOD FOR PRODUCING NITRIDE FILM ON SURFACES OF SEMICONDUCTOR COMPOUNDS	1999	Berkovits V.L. L'Vova T.V. Ulin V.P.	RU2168237C2
METHOD FOR PRODUCTION OF NITRIDE FILM ON GaSb SURFACE	2008	Berkovits Vladimir Leonidovich Kunitsyna Ekaterina Vadimovna L'Vova Tat'Jana Viktorovna Ulin Vladimir Petrovich Jakovlev Jurij Pavlovich	RU2368033C1
METHOD OF MAKING NITRIDE FILM ON SURFACE OF GaSb BASED HETEROSTRUCTURE	2008	Berkovits Vladimir Leonidovich Kunitsyna Ekaterina Vadimovna L'Vova Tat'Jana Viktorovna Ulin Vladimir Petrovich Jakovlev Jurij Pavlovich Andreev Igor' Anatol'Evich	RU2370854C1
APPARATUS FOR PRODUCING ARTICLES AND COATINGS FROM BORON NITRIDE	1991	Demin V.N. Levchuk S.G. Tret'Jakov A.G.	RU2042751C1
METAL-DIELECTRIC-SEMICONDUCTOR STRUCTURE BASED ON AB COMPOUNDS AND ITS FORMATION METHOD	2010	Kesler Valerij Gennad'Evich Kovchavtsev Anatolij Petrovich Guzev Aleksandr Aleksandrovich Panova Zoja Vasil'Evna	RU2420828C1
PROCESS FOR PREPARING ZINC SULFIDE LAYERS ALLOYED WITH MANGANESE (II)	1992	Belyj V.I. Rastorguev A.A. Ivanova E.N. Larionov S.V. Zemskova S.M. Bessergenev V.G. Kovalevskaja Ju.A.	RU2051163C1
PROCESS FOR PREPARING ZINC SULFIDE LAYERS ALLOYED WITH MANGANESE	1992	Belyj V.I. Rastorguev A.A. Ivanova E.N. Larionov S.V. Kirichenko V.N. Bessergenev V.G. Kovalevskaja Ju.A.	RU2061015C1
DIFFUSATE FOR DOPING SEMICONDUCTORS OF AB TYPE	1993	Busygina L.A. Gorelenok A.T. Kamanin A.V. Mokina I.A. Jurre T.A. Jakimenko I.Ju. Shmidt N.M.	RU2050031C1
PROCESS OF PLASMA-CHEMICAL ETCHING OF MATERIALS FOR MICROELECTRONICS	1995	Amirov I.I. Izjumov M.O.	RU2090951C1

RU 2 012 092 C1

Authors

Smirnova T.P.

Jashkin I.L.

Khramova L.V.

Baklanov P.Ju.

Sysoeva N.P.

Amosov Ju.I.

Dates

1994-04-30—Published

1992-03-04—Filed