FIELD: microelectronics. SUBSTANCE: diffusate for doping semiconductors of A3B5 type contains 2-5 water solution of polyvinyl alcohol and 1-10 percents of doping additive in volume. This improves reproducibility of doping process and retains perfect crystal structure of semiconductor. EFFECT: decreased loss currents of diffusion p-n junction. 2 tbl
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Authors
Dates
1995-12-10—Published
1993-06-21—Filed