METHOD OF AND DEVICE FOR MANUFACTURING FILMS AND MONOCRYSTALS OF SUPERCONDUCTING METAL-OXIDE MATERIALS Russian patent published in 1994 - IPC

FIELD: superconductor engineering. SUBSTANCE: inert-gas ion beam coming from ion source and accelerated to 5-50 keV energy is shaped and separated by magnetic lens. Upon passing through differential evacuation chamber ions are introduced into evaporation chamber where they are fixed on ceramic target cooled by water. Metal-oxide ceramic target is sprayed on heated substrate in oxygen atmosphere and process goes on as long as required to obtain desired film thickness; then beam and heater are turned off, evaporation chamber is shut off by means of gate valves from vacuum pumps and filled with oxygen to pressure of 100 mm Hg; then it is opened to communicate with atmosphere and unsealed. Cooling time is 10-15 min. EFFECT: enlarged functional capabilities. 2 cl, 1 dwg