FIELD: instruments for microelectronics. SUBSTANCE: method involves generation of non-stoichiometric target of $$$ from superconducting film $$$ on substrate in gas mix of argon and oxygen in ratio of 2:2. Space between target and substrate which are located in opposite is in range of 20-30 mm. Critical point is equal to 91 K; maximal efficiency of production is equal to 0.22 mg per square cm in one hour. EFFECT: increased stoichiometric characteristics. 4 dwg, 1 tbl
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