METHOD FOR FORMING MULTILAYER STRUCTURES WITH DIFFERENT ELECTROPHYSICAL PROPERTIES Russian patent published in 1998 - IPC

FIELD: superconducting engineering. SUBSTANCE: thin films of YBa₂Cu₃O_7-x are applied by laser ablation of SrTiO₃, LaAlO₃, MgO, ZrO₂ on substrates sequentially from same target. Evaporation takes place in air or oxygen atmosphere at pressure of 0.5-0.05 Torr and lasts depending on time required to obtain desired film thickness at evaporation rate of 40 nm/min. Novelty is that laminated structure with different electricity conducting properties is obtained within single process cycle and from one target; for producing superconducting layer, substrate is heated to 780-950 C; for producing thin film with normal conductance, substrate is heated to 700-750 C and for semiconducting layer, to 400-650 C; finally, to obtain insulating layer, substrate is heated to 270-350 C. Upon evaporation, laser and heater are turned off, evaporation chamber is shut off by gate valved from vacuum pump. EFFECT: enlarged functional capabilities. 7 cl