METHOD FOR MANUFACTURING SUPERCONDUCTING WIRE Russian patent published in 2022 - IPC H01B13/00 H01M12/06 C23C14/35 

FIELD: electrical engineering.

SUBSTANCE: invention relates to the field of electrical engineering, namely to a method for manufacturing a superconducting wire, and can be used in the manufacture of superconducting wires by reactive magnetron sputtering. To achieve the effect, metal oxide films of the superconducting wire are stably formed at a high rate by controlling reactions in the transition region of reactive magnetron sputtering, and the method includes forming a buffer layer containing an Al₂O₃ layer on the substrate, wherein the Al₂O₃ layer is formed by a reactive magnetron sputtering method, wherein the first oxygen gas is used as a reaction gas and a sputtering target made of aluminum metal, wherein the Al₂O₃ layer is formed with the supply of the first oxygen gas at a first concentration being the concentration of the first oxygen gas at which the Al emission intensity in the plasma near the surface of the sputtered target is not less than 25% and not more than 80% of the first reference value, and the first reference value is the Al emission intensity at which the concentration of the first gaseous oxygen is zero; and forming a superconducting layer over the buffer layer.

EFFECT: increasing the manufacturing speed ​​of buffer layers of high critical superconducting wire.

11 cl, 14 dwg, 2 tbl, 4 ex