DEVICE FOR CONVEYING SUBSTRATES IN VACUUM UNIT Russian patent published in 1994 - IPC

FIELD: application of coatings in vacuum. SUBSTANCE: locking clamp has the form of movable plate with compression spring whose one end is connected to the movable plate and the other to guide plate having threaded hole with screw connected to casing for rotation. Casing accommodates cover plate capable of turning to an angle of 90 degrees and flexible stop member mounted on pin. Stops are provided in the travel path of substrate, whereas inner surface of the cover plate is coated with electret material preliminarily processed in electrostatic field. EFFECT: expanded range of controllable clamping forces at different diameters of substrate. 3 cl, 2 dwg, 1 tbl