FIELD: electronics industry. SUBSTANCE: evaporator is mounted in chamber on blank hermetically connected with bellows which is hermetically connected with vacuum chamber; movably connected with blank by one end is eccentric shaft; connection of eccentric shaft is effected through antifriction bearing; other end of eccentric shaft is movably connected with carrier which is provided with spiral groove; carrier is rotatably mounted on shaft of electric motor and volute is fixed on end of electric motor. EFFECT: smoothness and uniformity of film applied.
| Title | Year | Author | Number |
|---|---|---|---|
| DEVICE FOR PLATING IN VECUUM APPARATUSES | 1992 |
|
RU2038416C1 |
| APPARATUS FOR MOVING SUBSTRATE HOLDER | 1997 |
|
RU2115764C1 |
| THIN FILM APPLYING APPARATUS | 1997 |
|
RU2114931C1 |
| DEVICE FOR LOADING EVAPORATORS OF VACUUM SPRAYING EQUIPMENT | 1992 |
|
RU2041288C1 |
| MANIPULATOR | 1992 |
|
RU2028927C1 |
| DEVICE FOR CONVEYING AND POSITIONING PARTS | 1992 |
|
RU2008196C1 |
| VACUUM UNIT EVAPORATOR | 0 |
|
SU1810393A1 |
| THREE-DIMENSIONAL MECHANISM | 1992 |
|
RU2008198C1 |
| CATHODE JOINT FOR IONIC-PLASMA APPLICATION OF THIN FILMS IN VACUUM | 1992 |
|
RU2074904C1 |
| CLEAN ROOM | 1994 |
|
RU2074930C1 |
