METHOD OF GROWING SEMICONDUCTOR CRYSTALS Russian patent published in 1994 - IPC

Abstract RU 2023770 C1

FIELD: chemistry and physics; methods for producing A3B5 compounds. SUBSTANCE: this method prescribes additionally introducing transport agent into ampule and running process at source temperature by 100 to 600 C lower compound melting point. Seed crystal temperature should be by 5 to 100 C lower than source temperature. Highly volatile component pressure should be maintained within range up to 1 atm from equilibrium value at seed crystal temperature. Disclosed method allows producing A3B5 crystals about 40 mm in diameter and about 17 mm in height. Crystals have regular geometrical shape and prescribed crystallographic orientation. EFFECT: high-quality crystals. 2 cl, 1 dwg, 1 tbl

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RU 2 023 770 C1

Authors

Markov E.V.

Chegnov V.P.

Perepletchikov V.S.

Kulikov A.P.

Kornev S.A.

Dates

1994-11-30Published

1990-07-19Filed