METHOD OF OBTAINING BIG-VOLUME MONOCRYSTALS OF GALLIUM ANTIMONIDE WITH LOW DISLOCATION DENSITY Russian patent published in 2014 - IPC C30B15/04 C30B15/36 C30B29/40 

Abstract RU 2534106 C1

FIELD: chemistry.

SUBSTANCE: invention relates to field of obtaining semi-conductor materials, which are applied as substrate material in isoperiod heterostructures based on triple and fourfold solid solutions in systems Al-Ga-As-Sb and In-Ga-As-Sb, which make it possible to create broad range of optoelectronic devices (sources and receivers of irradiation on spectral range 1.3-2.5 mcm). Method includes synthesis from initial components and growing of monocrystals by method of Czochralski in hydrogen atmosphere on seed, oriented in crystallographic direction [100]. To initial components added is isovalent admixture of indium in form of especially pure indium antimonide (InSb) in the interval of elementary indium concentration (2-4)×1018 at/cm3, with synthesis and growing of monocrystals being realised in single technological cycle.

EFFECT: invention makes it possible to obtain big-volume low dislocation density monocrystals of gallium antimonide with reduced dislocation density.

2 cl, 1 dwg, 2 tbl, 1 ex

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RU 2 534 106 C1

Authors

Ezhlov Vadim Sergeevich

Mil'Vidskaja Alla Georgievna

Molodtsova Elena Vladimirovna

Dates

2014-11-27Published

2013-07-24Filed