FIELD: measurement technology. SUBSTANCE: device has a monochromatic radiation source which radiation is directed onto a specimen at continuously varying light incidence angle, planar rotating mirror for continuously varying the incidence angle, two elliptic mirrors through a focus of which a rotation axis of the planar mirror passes, radiation detector located in a focus of second elliptic mirror. Reflected radiation intensity variations are studied by plotting an interference curve the number of maxima of which is used for determining a film thickness is irradiated point of the specimen. EFFECT: widened application range due to substantially reduced measuring time. 1 dwg
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