FIELD: ionic-plasma technology. SUBSTANCE: working chamber is filled with hydrogen and/or helium plasma, and workpiece surface is treated by accelerated ions of plasma by applying the negative potential to the workpiece. The working chamber is filled with plasma of gaseous discharge, and the negative potential is applied relative to various members. EFFECT: facilitated procedure. 5 cl
Title | Year | Author | Number |
---|---|---|---|
METHOD FOR ARTICLE TREATMENT | 1992 |
|
RU2026414C1 |
PROCEDURE FOR HEATING ITEMS IN PLASMA | 2009 |
|
RU2407821C1 |
APPARATUS FOR SURFACE STRENGTHENING BY TREATMENT | 1992 |
|
RU2037561C1 |
METHOD FOR INTEGRATED TREATMENT OF ARTICLES | 1992 |
|
RU2039843C1 |
COATING APPLICATION UNIT | 1991 |
|
RU2022056C1 |
DEVICE FOR PROCESSING PRODUCTS IN VACUUM | 1992 |
|
RU2042289C1 |
METHOD OF COMBINED HARDENING OF CUTTING TOOLS | 2018 |
|
RU2708024C1 |
FAST NEUTRAL MOLECULE SOURCE | 1996 |
|
RU2094896C1 |
METHOD OF VACUUM ION-PLASMA TREATMENT | 1996 |
|
RU2122602C1 |
METHOD OF ION-PLASMA PRODUCTION OF NANOSTRUCTURES ON TUNGSTEN SURFACE | 2019 |
|
RU2694177C1 |
Authors
Dates
1995-01-09—Published
1992-07-09—Filed