FIELD: vacuum-plasma treatment of articles. SUBSTANCE: method for integrated treatment of articles consists in treatment of articles with gas plasma of non-self-maintained discharge which is initiated by electrons separated from metal-gas stage of arc discharge plasma where operations of cleaning and heating are carried out simultaneously with exposure of treated articles to beam of accelerated particles. Accelerated particles should have energy above threshold of spraying of article material. The method offers the highest efficiency in treatment of articles made of dielectric materials. In this case, item is found in plasma at floating potential (low-voltage negative potential) which is initiated on its surface by plasma electrons. Energy of accelerated particles beam is determined mainly by characteristics of source of these particles. This makes it possible to treat (heating and cleaning) article at any value and sign of potential across articles including the case of no potential. EFFECT: extended operating capabilities of the plant realizing the given method due to combined treatment of articles with plasma particles of non-self-maintained gas discharge and accelerated particles of beam generated by self-maintained source. 2 cl
Authors
Dates
1995-07-20—Published
1992-03-03—Filed