Patenton — panteon of patents

(19)

RU

(11)

2 027 327

(13)

C1

(51)

IPC

(21) (22)

Application

4913532/25, 1991-02-25

(22)

Actual filing date

1991-02-25

(45)

Published

1995-01-20

(72)

Inventor

Lisitsyn A.I.

(73)

Holder

Lisitsyn Anatolij Ivanovich

METHOD FOR DETERMINING ELECTRON CONCENTRATION IN BEAM-PLASMA MICROWAVE DEVICES Russian patent published in 1995 - IPC

Abstract RU 2027327 C1

FIELD: beam-plasma microwave devices. SUBSTANCE: method involves determination of plasma current on device side surface, measurement of gas pressure inside device, and calculation of plasma concentration using equation given in description of invention. EFFECT: facilitated procedure. 2 cl, 2 dwg

Similar patents RU2027327C1

Title Year Author Number
METHOD OF DETERMINATION OF CONCENTRATION OF ELECTRODES IN PLASMA GENERATED IN BEAM-PLASMA DEVICES 1989
  • Lisitsyn A.I.
  • Komov A.L.
 SU1820827A1
BEAM-PLASMA S H F DEVICE 1991
  • Lisitsyn A.I.
 RU2014663C1
BEAM-PLASMA MICROWAVE DEVICE (VERSIONS) 2006
  • Zav'Jalov Mikhail Aleksandrovich
  • Martynov Vladimir Filippovich
  • Tjurjukanov Pavel Mikhajlovich
  • Kazakov Aleksej Ivanovich
 RU2330347C1
METHOD FOR PRODUCING ION BEAM 1991
  • Kuz'Min R.N.
  • Staroverov L.I.
  • Muksunov A.M.
  • Shapkin V.V.
  • Petrov V.B.
  • Nikiforov V.A.
  • Khripunov B.I.
 SU1829742A1
PLASMA-BEAM MICROWAVE COMPLEX 2005
  • Perevodchikov Vladimir Innokent'Evich
  • Martynov Vladimir Filippovich
  • Zav'Jalov Mikhail Aleksandrovich
  • Lisin Vladimir Nikolaevich
  • Tjurjukanov Pavel Mikhajlovich
  • Gusev Stanislav Ivanovich
 RU2285975C1
METHOD OF MEASURING DENSITY OF IONS OF MULTICOMPONENT PLASMA 2023
  • Strokin Nikolaj Aleksandrovich
  • Rigin Arsenij Vladimirovich
 RU2817394C1
METHOD FOR PLASMOCHEMICAL ETCHING OF SEMICONDUCTOR AND INSULATING MATERIALS 2006
  • Shustin Evgenij Germanovich
  • Isaev Nikolaj Vasil'Evich
  • Fedorov Jurij Vladimirovich
 RU2316845C1
BEAM-PLASMA MICROWAVE DEVICE 1986
  • Perevodchikov V.I.
  • Batskikh G.I.
  • Sushin Ju.V.
  • Zav'Jalov M.A.
  • Lisin V.N.
  • Martynov V.F.
  • Shapiro A.L.
  • D'Jakov V.M.
 RU2084986C1
METHOD AND DEVICE FOR PULSED PERIODIC APPLICATION OF VACUUM COATINGS 1996
  • Maevskij V.A.
  • Obrezkov O.I.
  • Vershok B.A.
  • Margulev I.Ja.
  • Sorokin V.Ju.
 RU2141004C1
BEAM-PLASMA MICROWAVE DEVICE 2005
  • Zav'Jalov Mikhail Aleksandrovich
  • Martynov Vladimir Filippovich
  • Tjurjukanov Pavel Mikhajlovich
 RU2290713C1

RU 2 027 327 C1

Authors

Lisitsyn A.I.

Dates

1995-01-20—Published

1991-02-25—Filed

read Similar patents