FIELD: production of polycrystalline layers. SUBSTANCE: device for producing polycrystalline layers of compounds of A2B6 type has working chamber, heater, evaporator, roughing-down pump and precipitation circuit and is provided with combined trap having base in form of plate with holes and cover. Device dimensions are offered. EFFECT: higher efficiency. 1 dwg
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Authors
Dates
1995-04-30—Published
1993-03-30—Filed