DEVICE FOR PRODUCING POLYCRYSTALLINE LAYERS OF COMPOUNDS OF AB TYPE Russian patent published in 1995 - IPC

Abstract RU 2034100 C1

FIELD: production of polycrystalline layers. SUBSTANCE: device for producing polycrystalline layers of compounds of A2B6 type has working chamber, heater, evaporator, roughing-down pump and precipitation circuit and is provided with combined trap having base in form of plate with holes and cover. Device dimensions are offered. EFFECT: higher efficiency. 1 dwg

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RU 2 034 100 C1

Authors

Dadanov A.Ju.

Perepelitsa N.M.

Sukhobochenko V.G.

Dates

1995-04-30Published

1993-03-30Filed