METHOD FOR PROTECTION OF SEMICONDUCTOR DEVICES PRIOR TO THEIR SEALING Russian patent published in 1995 - IPC

Abstract RU 2036538 C1

FIELD: microelectronics. SUBSTANCE: compound composed of rolivsan and aromatic solvents is used as protective coating of chip. Compound is cured at 120-250 C for 5-7 h. EFFECT: improved reliability of protective coating. 2 cl, 2 dwg

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RU 2 036 538 C1

Authors

Tsareva L.G.

Zajtsev B.A.

Tsygankova T.S.

Saenko E.K.

Rodionov V.S.

Dates

1995-05-27Published

1990-07-02Filed