SEMICONDUCTOR CHIP MANUFACTURING PROCESS Russian patent published in 1994 - IPC

Abstract RU 2012095 C1

FIELD: semiconductor engineering. SUBSTANCE: resistive-contact metal is applied to semiconductor strip with formed structures of semiconductor devices and shielding metal coat is made on top. Semiconductor strip is mechanically divided into chips. Side surfaces formed in the process are covered with protective polymeric compound, shielding metal is chemically removed. Base metals of groups IY-YIII and their alloys are used as resistive-contact metals. EFFECT: facilitated procedure. 3 cl, 1 tbl

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RU 2 012 095 C1

Authors

Kolomitskij Nikolaj Grigor'Evich

Astapov Boris Aleksandrovich

Dates

1994-04-30Published

1992-04-15Filed