FIELD: measurement technology. SUBSTANCE: temperature-sensitive element has case with base and lid, temperature-sensitive layer of germanium on substrate of semi-insulating gallium arsenide, leads connected to temperature-sensitive layer of germanium. Layer of germanium is manufactured from monocrystal with concentrations of gallium and arsenic impurities 1018- 5· 1019 cm-3 and compensation 0.9-1.0 on substrate of gallium arsenide with orientation (100). EFFECT: expanded application range, enhanced operational stability.
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Authors
Dates
1995-06-19—Published
1991-07-15—Filed