FIELD: analysis of materials. SUBSTANCE: transducer has a silicon sublayer with a dielectric diaphragm and film ring heater which encloses measuring electrodes. A gas-sensitive layer is formed on the diaphragm between the measuring electrodes. The inner measuring electrode is made up as a ring whose center is in coincident with the center of the diaphragm and center of the film heating member made as an open ring which is also the outer measuring electrode. EFFECT: enhanced reliability. 2 dwg
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