Patenton — panteon of patents

(19)

RU

(11)

2 054 664

(13)

C1

(51)

IPC

(21) (22)

Application

93005769/25, 1993-02-01

(22)

Actual filing date

1993-02-01

(45)

Published

1996-02-20

(72)

Inventor

Zhukov G.F.Chepurenko O.F.

(73)

Holder

Nizhegorodskoe Proizvodstvennoe Predprijatie Pljus"

GAS COMPOSITION TRANSDUCER Russian patent published in 1996 - IPC

Abstract RU 2054664 C1

FIELD: measurement technology. SUBSTANCE: device has silicium sublayer with silicium dioxide membrane having in series: resistive heater, insulating dielectric layer, sensitive material layer. The membrane is circular. The resistive heater has the unclosed ring shape, which center coincides with the circular membrane center, and its radius is less than that of the circular membrane. Film-type contact members are on the free end face edges of the resistive heater. EFFECT: enhanced sensitivity of transducer. 2 dwg

Similar patents RU2054664C1

Title Year Author Number
RESISTIVE GAS TRANSDUCER 1992
  • Zhukov G.F.
  • Smolin V.K.
 RU2038589C1
SENSOR OF GAS ANALYZER 1992
  • Anisimov S.I.
  • Skupov V.D.
  • Shengurov V.G.
 RU2030738C1
METHOD OF MAKING SENSITIVE ELEMENTS OF GAS CONCENTRATION SENSORS 2015
  • Veselov Denis Sergeevich
  • Voronov Yurij Aleksandrovich
 RU2597657C1
METHOD FOR MANUFACTURING MULTIPURPOSE GAS COMPOSITION SENSORS 2010
  • Voronov Jurij Aleksandrovich
  • Veselov Denis Sergeevich
  • Voronov Sergej Aleksandrovich
  • Orlova Ljudmila Konstantinovna
 RU2449412C1
MICROHEATER FOR SEMICONDUCTOR CHEMICAL GAS SENSOR 2022
  • Krivetskij Valerij Vladimirovich
  • Amelichev Vladimir Viktorovich
  • Sagitova Alina Salavatovna
  • Polomoshnov Sergej Aleksandrovich
  • Generalov Sergej Sergeevich
  • Nikolaeva Anastasiya Vladimirovna
 RU2797145C1
THERMO-ANEMOMETER INDICATOR OF MASS FLOW OF LIQUIDS AND GASES 2004
  • Berezkin Valerij Alekseevich
  • Matveeva Nadezhda Konstantinovna
  • Mushta Viktor Mikhajlovich
  • Pevgov Vjacheslav Gennad'Evich
  • Shkuropat Ivan Georkievich
 RU2276775C2
SEMICONDUCTOR SENSOR FOR RECORDING EXPLOSIVE GASEOUS COMPONENTS CONTAINED IN AIR 2002
  • Sinitsa S.P.
 RU2231779C1
HYBRID INTEGRATED CIRCUIT OF GAS SENSOR 1996
  • Iovdal'Skij V.A.(Ru)
  • Olikhov I.M.(Ru)
  • Blejvas I.M.(Ru)
  • Ipolitov V.M.(Ru)
 RU2137117C1
SEMICONDUCTOR GAS SENSOR AND PROCESS OF ITS MANUFACTURE 1998
  • Shustrov A.V.
  • Kobozeva G.A.
  • Mironenko I.A.
 RU2143678C1
SEMICONDUCTOR METAL-OXIDE GAS SENSOR 2001
  • Rembeza S.I.
  • Svistova T.V.
  • Gorlova G.V.
  • Rembeza E.S.
 RU2206082C1

RU 2 054 664 C1

Authors

Zhukov G.F.

Chepurenko O.F.

Dates

1996-02-20—Published

1993-02-01—Filed

read Similar patents