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2 044 367

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C1

(51)

IPC

(21) (22)

Application

5041647/25, 1992-02-28

(22)

Actual filing date

1992-02-28

(45)

Published

1995-09-20

(72)

Inventor

Rubtsov N.M.Nagornyj S.S.Azatjan V.V.

(73)

Holder

Rubtsov Nikolaj Mikhajlovich

METHOD FOR PRODUCING THIN INSULATING COATINGS Russian patent published in 1995 - IPC

Abstract RU 2044367 C1

FIELD: microelectronics very large-scale integrated circuits. SUBSTANCE: method involves excitation of high-frequency discharge of power density not over 0.7 W/cu. cm in gas mixture containing SiCl4 or metal carbonyls mixed with oxygen and/or ammonia at common pressure 3,5·102 torr by means of inductor at room temperature on substrates placed beyond plasma excitation region behind inductor. EFFECT: facilitated procedure. 5 dwg, 1 tbl

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RU 2 044 367 C1

Authors

Rubtsov N.M.

Nagornyj S.S.

Azatjan V.V.

Dates

1995-09-20—Published

1992-02-28—Filed

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