ELECTRIC ARC EVAPORATOR CATHODIC UNIT Russian patent published in 1995 - IPC

FIELD: vacuum- plasma deposition of metal-bearing versatile coatings applied onto elongate products. SUBSTANCE: cathode has elongate evaporation surface and cooled surface opposed to evaporation surface. Cathode cooling base is made in the form box-shaped housing open at one side and connected in hermetically sealed relation to cathode surface to be cooled so that medium cooling cavity is defined. Two current leads are connected with cathode ends for providing electric connection of cathode with discharge power supply source for alternative connection of leads through controllable keys. Cathode cooling base is electrically insulated from cathode surface to be cooled and from leads. Control unit for controlling position of cathode spot on evaporation surface is disposed adjacent to cathode evaporation surface. Control unit has independent leads for providing electrical connection with control key switch elements through control device. Cooling medium supply-discharge devices are made in the form of tubes. EFFECT: increased efficiency of unit by enhanced stability in control of cathode spot position on cathode evaporation surface and sufficient cooling of cathode. 3 cl, 2 dwg