CATHODE UNIT OF ELECTRIC ARC EVAPORATOR Russian patent published in 1996 - IPC

Abstract RU 2061787 C1

FIELD: equipment for vacuum- plasma application of coatings, mainly, in mechanical engineering for application of hardening coatings to tools and machine parts with extended in plane geometric shape of treated surface. SUBSTANCE: cathode 1 of electric arc evaporator is made with evaporation surface extended across two coordinates and is in shape of plate with slots 5 and 6 made through the whole thickness and having dead end. Dead ends of adjacent slots are directed to opposite sides of the plate to form evaporation zigzag surfaces 2 of the cathode. Connected to end sections of evaporation surface 2 of cathode 1 are two current leads 7 and 8 to effect electrical connection of the cathode with discharge power source via the controlled switches for their alternating connection. Means for monitoring the position of cathode spot on the cathode evaporation surfaces are installed near the cathode evaporation surface. EFFECT: provision of application of coatings uniform in thickness to immovable extended products with comparable longitudinal and traverse sizes of treated surfaces. 2 cl, 3 dwg

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RU 2 061 787 C1

Authors

Sablev L.P.

Grigor'Ev S.N.

Dates

1996-06-10Published

1993-08-31Filed