METHOD FOR MANUFACTURE OF MICROPOROUS MEMBRANES Russian patent published in 1996 - IPC

FIELD: manufacture of microporous membranes. SUBSTANCE: method for manufacture of microporous membranes includes exposure of films or plates to irradiation with fluxes of high-energy particles and their subsequent etching. Prior to irradiation, film or plate is treated with chemical agent to cause its swelling and a layer of flexible resist is applied. After irradiation, film or plate is subjected to shrinking. Treatment with etching agent is accomplished in two stages. At the first stage, through holes are etched with the layer of flexible resist with the etching agent which does not affect the initial film, and at the second stage, through holes are made in the film of plate through holes made earlier in the flexible resist. Flexible resist is used in form of Langmuir film. Shrinking may be conducted before or after the first etching stage. Prior to the second stage of etching, film or plate may be additionally irradiated with fluxes of high-energy particles through holes in flexible resist. EFFECT: higher efficiency. 8 cl, 1 dwg