FIELD: microwave devices, in particular design and manufacturing off thin-film structures. SUBSTANCE: resistors are located between first conducting and dielectric layers. Dielectric layer provides possibility to exclude interaction between resistive material and oxygen in air. EFFECT: stability of thin-film resistors is increased by factor of ten, increased stability of thin film structure. 2 dwg
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Authors
Dates
1996-09-27—Published
1982-08-09—Filed