FIELD: production of silicon for stabilitrons and epitaxy substrates. SUBSTANCE: into silicon melt containing boron substitution admixture in concentration 3.6 • 10-4 - 8.1 • 10-2 wt %, aluminium is introduced as a second admixture to concentration 3 • 10-1 - 3 • 10-2 wt % in respect to silicon. EFFECT: improved quality of crystal. 2 tbl
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Authors
Dates
1996-12-10—Published
1992-02-04—Filed