METHOD OF GROWING SILICON MONOCRYSTALS Russian patent published in 2001 - IPC

Abstract RU 2177513 C1

FIELD: crystal growing. SUBSTANCE: silicon monocrystals are grown according to Chokhralski method using rotation of crucible at speed 0.2 to 2.0 rpm and counterrotation of crystal at speed 0.2 to 20 rpm, bending deflection of crystallization front in direction of inoculum being no greater than 0.2. Crystals are fit for use as semiconductors in electronics. EFFECT: decreased number of microdefects in crystals. 1 dwg, 4 ex

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RU 2 177 513 C1

Authors

Pul'Ner Eh.O.

Iliopulo T.Eh.

Dates

2001-12-27Published

2000-09-20Filed