ELECTRIC ARC EVAPORATOR TO DEPOSIT COATS IN VACUUM Russian patent published in 1997 - IPC

Abstract RU 2077604 C1

FIELD: electrical engineering. SUBSTANCE: proposed electric arc evaporator incorporates consumable cathode 1, anode-chamber 2, trigger electrode 3. Basic portion of ion-plasma flux propagates isotopically through bevel cut of screen 4 towards substrate holder with article 5 which are positioned at distance of two diameters of cathode 1. Substrate-article 5 is connected with the use of variable resistor 7 to positive pole of D.C. source 6 for stabilization of burning of electric arc. Screen protrudes above surface of cathode by distance equal to 0.7-0.8 diameter of cathode. EFFECT: enhanced operational reliability and efficiency. 2 cl, 1 dwg

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RU 2 077 604 C1

Authors

Antsiferov V.N.

Kosogor S.P.

Makarov A.M.

Dates

1997-04-20Published

1993-07-01Filed