FIELD: electrical engineering. SUBSTANCE: proposed electric arc evaporator incorporates consumable cathode 1, anode-chamber 2, trigger electrode 3. Basic portion of ion-plasma flux propagates isotopically through bevel cut of screen 4 towards substrate holder with article 5 which are positioned at distance of two diameters of cathode 1. Substrate-article 5 is connected with the use of variable resistor 7 to positive pole of D.C. source 6 for stabilization of burning of electric arc. Screen protrudes above surface of cathode by distance equal to 0.7-0.8 diameter of cathode. EFFECT: enhanced operational reliability and efficiency. 2 cl, 1 dwg
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Authors
Dates
1997-04-20—Published
1993-07-01—Filed