APPARATUS FOR APPLYING MULTILAYER VACUUM-PLASMA COATINGS Russian patent published in 1997 - IPC

Abstract RU 2087585 C1

FIELD: application of coatings. SUBSTANCE: coatings are formed by means of apparatus wherein in vacuum chamber 1 between cathode 4 and anode 5, arc burning in cathode material vapors is excited by assistance of ignitor electrode 6. When igniting two, three and more evaporators and switching on planetary revolution mechanism 7, multilayer coating is applied onto object secured on carrier-holder 2. When object gets into the first electroarc flux, coating is applied from the same material which is generated by given evaporator. Plasma flux formed in the zones of other evaporators is shielded by plates of shield 8. When two electroarc evaporators are employed, coatings consisting of alternating nanolayers each 0.5-1.0 nm thick can be obtained using shield 8. EFFECT: facilitated procedure. 2 dwg

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RU 2 087 585 C1

Authors

Antsiferov V.N.

Kosogor S.P.

Kostrov D.V.

Dates

1997-08-20Published

1995-07-20Filed