PRESSURE GAUGE Russian patent published in 1997 - IPC

FIELD: instruments, in particular, devices for measurement of absolute and excess pressure and pressure difference. SUBSTANCE: device has semiconductor sensitive element 1 which is made using planar microelectronic technology and has tension resistors. It is connected to silicon or glass plate 2. In addition device has housing 4 and cap 5 which provide sealed connection. Flexible corrugated diaphragm 6 is located in space between housing and cap and has metal current-conducting tracks 7 and contact plates 8 which are connected to contact plates of semiconductor sensitive element 1. Novel feature of device is flexible diaphragm 6 on which sensitive element 1 is located using surface wiring so that it is isolated against device housing. EFFECT: increased reliability against mechanical effects, decreased additional error caused by wiring processes and temperature, simplified design, decreased cost of manufacturing. 2 dwg