FIELD: instrumentation engineering. SUBSTANCE: sensing element has membrane made of semiconductor material with resistors located on its face side. It also has main boss made of the same material for termination of membrane edge on rear side. Sensing element is provided with auxiliary boss for termination of membrane edge on face side. This boss is also made of semiconductor material. Auxiliary boss is positioned at obtuse angle to membrane surface, and its internal edge coincides with membrane edge on face side. EFFECT: more effective construction. 2 cl, 2 dwg
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Authors
Dates
1998-03-10—Published
1993-08-17—Filed