SENSING ELEMENT Russian patent published in 1998 - IPC

Abstract RU 2106610 C1

FIELD: instrumentation engineering. SUBSTANCE: sensing element has membrane made of semiconductor material with resistors located on its face side. It also has main boss made of the same material for termination of membrane edge on rear side. Sensing element is provided with auxiliary boss for termination of membrane edge on face side. This boss is also made of semiconductor material. Auxiliary boss is positioned at obtuse angle to membrane surface, and its internal edge coincides with membrane edge on face side. EFFECT: more effective construction. 2 cl, 2 dwg

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RU 2 106 610 C1

Authors

Kobyljanskij P.A.

Tinjakov Ju.N.

Mishachev V.I.

Mikhajlenko V.A.

Dates

1998-03-10Published

1993-08-17Filed