FIELD: medicine, metrology, scientific research, measurement of pressure of liquids and gases. SUBSTANCE: proposed tensoconverter has quadratic elastic element 1 manufactured from silicon of n type of conductance with crystallographic plane (100) and sensitive element 2 made from silicon of p type of conductance with center lying in direction [100] put on edge of elastic element and axes lying in direction <100>. Sensitive element 2 is produced in the form of symmetric cross, current 3, 4 and potential 5, 6 contacts are arranged on butt sides of cross prongs. EFFECT: increased value of output signal thanks to selection of special form of region of spread of currents, simplified technology of manufacture of pressure tensoconverter. 2 dwg
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Authors
Dates
1997-07-27—Published
1995-07-27—Filed