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2 089 658

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C1

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IPC

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Application

93015058/02, 1993-03-22

(22)

Actual filing date

1993-03-22

(45)

Published

1997-09-10

(72)

Inventor

Ivashov E.N.Kondrashov P.E.Orinchev S.M.Sleptsov V.V.Stepanchikov S.V.

(73)

Holder

Moskovskij Gosudarstvennyj Institut Ehlektroniki I Matematiki Universitet)

CATHODE UNIT Russian patent published in 1997 - IPC

Abstract RU 2089658 C1

FIELD: cathode units. SUBSTANCE: the offered cathode unit applicable in application of thin films in vacuum has magnetic system made in form of electromagnets with closed magnetic field. Each electromagnet has inductance coil and core whose one end is connected with common yoke, and its other end is connected with common nose. Unit is provided with, at least, three electromagnets, each having separate supply system. EFFECT: higher efficiency. 3 dwg

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RU 2 089 658 C1

Authors

Ivashov E.N.

Kondrashov P.E.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-09-10—Published

1993-03-22—Filed

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