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2 089 659

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Application

93018757/02, 1993-04-12

(22)

Actual filing date

1993-04-12

(45)

Published

1997-09-10

(72)

Inventor

Ivashov E.N.Kondrashov P.E.Orinchev S.M.Sleptsov V.V.Stepanchikov S.V.

(73)

Holder

Moskovskij Gosudarstvennyj Institut Ehlektroniki I Matematiki Universitet)

DESIGN OF CATHODE UNIT FOR APPLICATION OF FILMS IN VACUUM Russian patent published in 1997 - IPC

Abstract RU 2089659 C1

FIELD: cathode units for application of films in vacuum. SUBSTANCE: vacuum chamber is made of nonmagnetic material in form of rectangular parallelepiped whose side walls are of dielectric, material and height parallelepiped equals half of magnetic system width which is located outside the vacuum chamber. Magnetic system with closed magnetic field is made in form of frame installed on vacuum chamber for linear motion, and poles of magnetic system are directed inside the frame. EFFECT: higher induction in working gap and higher speed of material spraying. 2 cl, 3 dwg

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RU 2 089 659 C1

Authors

Ivashov E.N.

Kondrashov P.E.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-09-10—Published

1993-04-12—Filed

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