CATHODE UNIT FOR PRODUCTION OF THIN FILMS IN VACUUM Russian patent published in 1997 - IPC

Abstract RU 2089660 C1

FIELD: cathode units for production of thin films in vacuum. SUBSTANCE: in course of production process in vacuum, magnetic system moves as film grows on local section by means of moving device. Induction of magnetic field is constant over the entire length of magnetic system due to preliminary adjustment of gaps in magnetic system with fixed yoke by moving cores made in form of set of angles relative to yoke with the help of transmission of screw-nut. Value of magnetic induction may be varied by varying current in circuit of inductance coil. Uniformity of magnetic field is ensured. EFFECT: higher efficiency. 3 dwg

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RU 2 089 660 C1

Authors

Ivashov E.N.

Kondrashov P.E.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-09-10Published

1993-03-22Filed