FIELD: cathode units for production of thin films in vacuum. SUBSTANCE: in course of production process in vacuum, magnetic system moves as film grows on local section by means of moving device. Induction of magnetic field is constant over the entire length of magnetic system due to preliminary adjustment of gaps in magnetic system with fixed yoke by moving cores made in form of set of angles relative to yoke with the help of transmission of screw-nut. Value of magnetic induction may be varied by varying current in circuit of inductance coil. Uniformity of magnetic field is ensured. EFFECT: higher efficiency. 3 dwg
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CATHODE UNIT | 1993 |
|
RU2089658C1 |
CATHODE UNIT | 1993 |
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METHOD FOR APPLYING METAL-DIELECTRIC THIN FILMS | 1999 |
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RU2208262C2 |
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Authors
Dates
1997-09-10—Published
1993-03-22—Filed