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2 089 661

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IPC

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Application

93017595/02, 1993-04-05

(22)

Actual filing date

1993-04-05

(45)

Published

1997-09-10

(72)

Inventor

Ivashov E.N.Kondrashov P.E.Orinchev S.M.Sleptsov V.V.Stepanchikov S.V.

(73)

Holder

Moskovskij Gosudarstvennyj Institut Ehlektroniki I Matematiki Universitet)

CATHODE UNIT Russian patent published in 1997 - IPC

Abstract RU 2089661 C1

FIELD: cathode units. SUBSTANCE: the offered cathode unit has members of gas supply in form of two blocks located over periphery of electrode target combined with substrate. Blocks are made to pass successively through them of inert and active gases by means of control valve system. Magnetic system regulates induction of magnetic field from zero to maximum working value. Substrate has mask installed for motion relative to substrate. EFFECT: higher efficiency. 2 cl, 4 dwg

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RU 2 089 661 C1

Authors

Ivashov E.N.

Kondrashov P.E.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-09-10—Published

1993-04-05—Filed

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