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2 089 663

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IPC

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Application

93020198/02, 1993-04-20

(22)

Actual filing date

1993-04-20

(45)

Published

1997-09-10

(72)

Inventor

Ivashov E.N.Kondrashov P.E.Orinchev S.M.Sleptsov V.V.Stepanchikov S.V.

(73)

Holder

Moskovskij Gosudarstvennyj Institut Ehlektroniki I Matematiki Universitet)

CATHODE UNIT WITH SUPPLY SYSTEM Russian patent published in 1997 - IPC

Abstract RU 2089663 C1

FIELD: application of thin films. SUBSTANCE: the offered cathode unit for application of thin films has anode made in form of concentric rings interconnected by connectors. Number of rings is not less than three. Rings are made so as to provide for their supply with potentials of various values from supply system. Wire diameter-to-ring diameter ratio is 0.05-0.1. Ratio of diameter of largest ring to distance from backing plane is not less than two, and ratio of distance between concentric circumferences of nearest rings to maximum diameter of wire is, at least, ten, and number of connectors between nearest rings is three. EFFECT: higher efficiency. 4 cl, 3 dwg

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RU 2 089 663 C1

Authors

Ivashov E.N.

Kondrashov P.E.

Orinchev S.M.

Sleptsov V.V.

Stepanchikov S.V.

Dates

1997-09-10—Published

1993-04-20—Filed

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