FIELD: microelectronics. SUBSTANCE: invention relates to nanoelectronics, scanning tunnel and atomic-power spectroscopy. Onto temporary carrier - potassium bromide monocrystal chip-gold layer is deposited by vacuum technique, which is then fixed with epoxy adhesive on main carrier, while temporary carrier is removed by dissolution in water. EFFECT: widened range of gold deposition conditions and simplified procedure.
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Authors
Dates
1997-11-27—Published
1993-05-18—Filed